MBE/MOCVD TECHNOLOGY

Our SV series adopts a vertical quartz reactor which is designed to the optimal level based on our outstanding simulation technology and years of our experience.
This reactor is the best selling machine for more than 30 years as to the materials for GaAs series and InP series.
SVS series also features a water-cooled close showerhead structure. Highly efficient growth is achieved by separately supplying highly reactive gas to the nearest wafer.
This reactor can be used for oxide growth such as Ga2O3.

Our SH series adopts a horizontal stainless steel reactor specifically developed for nitride semiconductors.
Our SH series has outstanding uniformity owing to the optimization of internal quartz flow channels which is designed by our simulation technology.
We have abundant track records in the materials for GaN and AlGaN series for research and development.