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MOCVD System

Vartical Reactor (SV2001/SV3001/SV4001(SV2003))

縦型リアクタ (SV2001/SV3001/SV4001(SV2003))

Our SV series adopts a vertical quartz reactor which is designed to the optimal level based on our outstanding simulation technology and years of our experience.
This reactor is the best selling machine for more than 20 years as to the materials for GaAs series and InP series.
This reactor has superior uniformity, repeatability and steepness due to a single-leaf machine, the property of which cannot be achieved by a multiple-leaf machine.
We have plenty of proven track records for production as well as for research purposes.

Horizontal Reactor (SH2001/SH3001/SH4001(SH2003))

横型リアクタ (SH2001/SH3001/SH4001(SH2003))

Our SH series adopts a horizontal stainless steel reactor specifically developed for nitride semiconductors.
Our SH series has outstanding uniformity owing to the optimization of internal quartz flow channels which is designed by our simulation technology.
We have abundant track records in the materials for GaN and AlGaN series for research and development.

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