MBE/MOCVD TECHNOLOGY

In order to manufacture high-performance films with good uniformity, it is necessary to have a heating mechanism with superior uniformity of temperature inside the substrate.

Features

• One can select susceptor shape arbitrarily in accordance with a gas flow pattern.
• Simplified arrangement around the reactor allows easy maintenance of reactor.
• Maintenance-free heater
• Easy and low-cost compatibility with mass production devices
• Adoption of metal reactors may improve safety