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Oxidation System for Vertical Cavity Surface Emitting Laser
VOX6001 / HiVOX 6001 (with real-time monitor)
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Specification
- Substrate size
- Substrate heating
- Max. heating temperature
- Material supply system
- Vacuum exhaust system
- Control device
- Oxidation performance
(Oxidation length)
- Options
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- Φ6-inch x 1, Φ4-inch x 1
Φ3-inch x 3, Φ2-inch x 7
- Resistance heating system
- 600℃(thermocouple value for control)
- Liquid mass flow controller
Thermal vaporizer (Max.180℃)
- Diaphragm pump
- Interlocking sequence controller
- Uniformity /10μm ±0.4μm (excepy for edge)
Reproducibility / 10μm ±0.4μm (run to run)
*Depending on the characteristics of AlAs epitaxy layer.
- Loder / unloder
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