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Oxidation System for Vertical Cavity Surface Emitting Laser

VOX6001 / HiVOX 6001 (with real-time monitor)PDFˆóü

iVOX4001

Specification

  • Substrate size

  • Substrate heating
  • Max. heating temperature
  • Material supply system
  • Vacuum exhaust system
  • Control device
  • Oxidation performance
    (Oxidation length)


  • Options


  • ƒ³6-inch x 1, ƒ³4-inch x 1
    ƒ³3-inch x 3, ƒ³2-inch x 7
  • Resistance heating system

  • 600Ž(thermocouple value for control)

  • Liquid mass flow controller
    Thermal vaporizer (Max.180Ž)
  • Diaphragm pump


  • Interlocking sequence controller
  • Uniformity /10ƒÊm }0.4ƒÊm (excepy for edge)
    Reproducibility / 10ƒÊm }0.4ƒÊm (run to run)
    *Depending on the characteristics of AlAs epitaxy layer.
  • Loder / unloder