MBE/MOCVD TECHNOLOGY

A pattern of gas flow in the reactor has a great influence on the epitaxial growth. However, since we cannot make sure of actual patterns, the optimization of reactor shape is left to empirical judgments to some extent under present circumstances. We have established a “Flow Visualization Technology” and a “Numerical Fluid Analysis Technology” to attempt to optimize the reactor shape. We have utilized the numerical fluid analysis to optimize the reactor shape according to customer’s demand.