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MBE System

For research purpose of small machines iRC1100j

¬Œ^Œ¤‹†—p (RC1100)
For personal use

A low-cost, space-saving and high performance MBE system for research purpose.
Though the MBE systems is small, it is possible to conduct full-fledged research.
The MBE system will support the development of new materials in combination with an analyzer such as STM.

For research iRC2100/RC3100j

Œ¤‹†—p (RC2100/RC3100)
For high-grade research

An optimum MBE system for research at higher level and quasi-production.
This system can support the use of various materials such as a material used for ‡U-‡Y group, Si series, metal series in addition to a material used for standard ‡V-‡X group.

For research & quasi-production iRC6100)

Œ¤‹†—pE€¶ŽY—p (RC6100)
For production

The K-cell substrate arrangement designed by take advanced type of molecular beam simulation technology achieves extremely uniform (}1% or less) crystal growth on a large-area holder (ƒ³8" or more), thus realizing high productivity.

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