MBE/MOCVD TECHNOLOGY

A low-cost, space-saving and high performance MBE system for research purpose.
Though the MBE systems is small, it is possible to conduct full-fledged research.
The MBE system will support the development of new materials in combination with an analyzer such as STM.

An optimum MBE system for research at higher level and quasi-production.
This system can support the use of various materials such as a material used for �U-�Y group, Si series, metal series in addition to a material used for standard �V-�X group.

The K-cell substrate arrangement designed by take advanced type of molecular beam simulation technology achieves extremely uniform (±1% or less) crystal growth on a large-area holder (Φ8" or more), thus realizing high productivity.