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Super High-Temperature Process Furnace for SiC
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Features
- Supports up to 6-inch
- Capable of growing at high-temperature (Max. 2200Ž)
- Capable of producing an increase in temperature rapidly (Within 1 minute from 1000Ž to 2000Ž
- Carbon free
- Ultra high vacuum specification (extremely low leak rate)
- Fully automated (process, transport)
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Specification
- Soaking area
- Max. heating temperature
- Ultimate pressure
- Chamber configuration
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- 160mmƒÓ~65mmH
- Max. 2200Ž
- 6.6~10-7Pa
- Two-chambers (heating chamber, loading chamber)
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