MBE/MOCVD TECHNOLOGY

Capable of high-precision control of film thickness, which was not previously achieved by an EB gun.

When ICF114 is used as a system mounting port, a shutter mechanism can be added to the K cell with a size of ICF70 (without shutter).

A single cell port allows for use of two kinds of materials.

Suitable for placing the evaporation source horizontally.

Ultra-small K cell suitable for use with analysis systems.

Evaporation source with a single port for providing a solid material and gas material.

Uses a rapid temperature rise/fall system to evaporate and sublimate the material and generates molecular beams.

Generate molecular beams from loaded various gas materials.

Suitable for using a particular material beam.

Optimum high-temperature K cell as an evaporation source for high melting point metals. Can be heated up to 2000℃.