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MBE System

Transfer System Corresponding to Satellite Configuration Multi-Chamber

サテライト構成マルチチャンバに対応する搬送システム

Arm transfer system based on our precise machining technology.
A 3-tier arm capable of rotating and expanding/contracting in ultra high vacuum transfers specimens in the direction of 360℃.
There are many track records in laboratories as well as adoption into machines for mass-production.