製品紹介

Home > Products > MBE System > Multi-Chamber Type MBE System for GaN

MBE System

Multi-Chamber Type MBE System for GaN

A multi-chamber type MBE system for GaN (high-throughput exhaust system mounted) and an insulating film & metal film forming MBE system (4-ream EB gun, K-Cell 8 type mounted) are connected in a transfer chamber.

GaN用マルチチャンバ型MBE装置