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K-Cell Series

Combination Cell (DSGC-1400SH)

コンビネーションセル

Features

Evaporation source with a single port capable of providing a solid material and gas material.

Use example:
Solid→ Dopant material, such as Si and Be
Gases → CBr4 etc.

Specification

  • Crucible


  • Heating temperature

  • Gas inlet Gas inlet
  • Mounting flange
  • Shutter mechanism
  • Solid material section, various crucibles (6cc)
    Gas material section, quartz
  • Solid material section, Max. 1300℃
    Gas material section, Max. 400℃

  • VCR1/4

  • ICF 114 or more

  • Available (single shutter plate type, compressed air drive/manual) or Not available.