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Micro Chamber (MC-600)

マイクロチャンバー
 600℃加熱時

When heating at 600℃

Features

After setting a substrate for measurement in a small chamber, it is possible to introduce and heat the evacuating gas. Furthermore, it is also possible to make an observation through a window for observation at the upper of the chamber.

Configuration (chamber unit)

  • Heating mechanism

  • Installed substrate size
  • Work distance
  • Observation window
  • Vacuum exhaust port
  • Ultimate pressure
  • Leak rate
  • Water cooling
  • Embedded heater
    Max. heating temperature 600℃ (TC value, at vacuum)
  • Max. 15 mm square
  • 10mm
  • Quartz (φ15 mm、t1.0 mm)
  • NW10 (not including vacuum pump and vacuum gauge)
  • 10-4Pa level
  • 1 x 10-9Pam3/s
  • With water cooling groove for window O-ring portion

Configuration (heating power supply)

  • Heating mechanism
  • Output voltage
  • Output current
  • PID control with program
  • 0〜120V
  • 0〜6A