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Multipurpose Annealing System (At-50)
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Features
Can be made a multipurpose annealing treatment.
Through a manual transfer rod, it is possible to take out and put in the specimens into the heating portion in a short period of time, thus raising/lowering the temperature at high speed.
Specification
- Gas controller
- Heater
- Transfer chamber
- Vacuum exhaust system
- Electric controller
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- Introduce nitrogen, argon and oxygen
- Electric heating system (1 zone)
Substrate size: 25 mm x 1
Substrate heating temperature: Max. 1100 °C
- Hatch for substrate loading
Manual transfer rod system
- Rotary pump (167 L/min)
- Operation panel
- Substrate heating power supply (programmable temperature control)
- Various interlock / error handling functions
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