| Oxidation system | |||
| For VCSELs | |||
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HiVOX6001 Specifications
 1x6”,1x4”,3x3”,7x2” Horizontal typeResistance heating Max.600℃ |
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| For SiC | |||
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OV4001
Specifications 1x4”Horizontal typeResistance heating Max.1400℃ |
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