ライン

MOCVD system
Horizontal type
SH2001 SH3001
SH20
03
SH4001

Specifications
1x2”, 1x3” 
3x2,1x4
Horizontal type
Resistance heating
Max.1300
for GaN, AlGaN
Vertical type
SV2001 SV3001
SV2003 SV4001

Specifications
1x2”, 1x3” 
3x2”, 1x4”
Vertical type
Resistance heating
Max.900
for GaAs, GaInNAs, InP
Liquid Delivery MOCVD system
MPC1100V
Specifications
1x1”
Vertical type
Lamp heating
Max.800
for Oxide
MPC2100H
Specifications
1x2”
Horizontal type
Resistance heating
Max.800
for Oxide
MPC6100
Specifications
1x6”
Horizontal type
Resistance heating
Max.800
for Oxide
Top

ライン

Copyright©EpiQuest,Inc. All Rights Reserved.