MOCVD system | ||
Horizontal type | ||
SH2001 SH3001 SH2003 SH4001 Specifications
1x2”, 1x3”
3x2”,1x4”
Horizontal type
Resistance heating
Max.1300℃
for GaN, AlGaN |
||
Vertical type | ||
SV2001 SV3001
SV2003 SV4001 Specifications
1x2”, 1x3”
3x2”, 1x4”
Vertical type Resistance heating
Max.900℃
|
||
Liquid Delivery MOCVD system | ||
MPC1100V
Specifications
1x1”
Vertical type
Lamp heating
Max.800℃
for Oxide
|
||
MPC2100H Specifications
1x2”
Horizontal type
Resistance heating
Max.800℃
for Oxide |
||
MPC6100 Specifications
1x6”
Horizontal type
Resistance heating
Max.800℃
for Oxide |
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