| MOCVD system | ||
| Horizontal type | ||
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SH2001 SH3001 SH2003 SH4001 Specifications
 1x2”, 1x3” 3x2”,1x4”
Horizontal typeResistance heating Max.1300℃for GaN, AlGaN |
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| Vertical type | ||
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SV2001 SV3001
SV2003 SV4001 Specifications
1x2”, 1x3” 3x2”, 1x4”
Vertical typeResistance heating Max.900℃ |
|
| Liquid Delivery MOCVD system | ||
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MPC1100V
Specifications
1x1” Vertical typeLamp heating Max.800℃ |
|
 |
MPC2100H Specifications
1x2” Horizontal type
Resistance heating Max.800℃ |
|
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MPC6100 Specifications
1x6” Horizontal type
Resistance heating Max.800℃ |
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