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| MBE | Molecular Beam Epitaxy |
| MOCVD |
Metal Organic Chemical Vapor Deposition@ |
| ECRƒ‰ƒWƒJƒ‹ƒZƒ‹ | ECRƒ‰ƒWƒJƒ‹ƒZƒ‹@@ ECRƒ‰ƒWƒJƒ‹ƒZƒ‹ƒf[ƒ^ |
| RHEED | RHEED |
| »•iƒJƒ^ƒƒO | ‚l‚a‚d‘•’u(1)@‚l‚a‚d‘•’u(2)@‚jƒZƒ‹ƒVƒŠ[ƒY ‚l‚n‚b‚u‚c‘•’u(1)@‚l‚n‚b‚u‚c‘•’u(2) ‚‰·‚b‚u‚c‘•’u@Ž_‰»‘•’u |
| VŒ^Ž_‰»˜F | VOX3001 iVOX3001@iVOX4001 –Ê”ŒõƒŒ[ƒU[Ž_‰»ƒvƒƒZƒX |
| µ°ÙE²ÝEÜÝCVD‘•’u | ALL IN ONE CVD |
| K-CELLƒVƒŠ[ƒY | ƒX[ƒp[ƒ~ƒjƒZƒ‹iKC-1300-S) ƒfƒ…ƒAƒ‹ƒZƒ‹iDSGC-1400-SH) ƒJƒXƒ^ƒ€ƒZƒ‹ |