Oxidation system | |||
For VCSELs | |||
HiVOX6001 Specifications
1x6h,1x4h,3x3h,7x2h
Horizontal type
Resistance heating
Max.600Ž
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For SiC | |||
OV4001
Specifications 1x4h Horizontal type
Resistance heating
Max.1400Ž
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