K-cell Series | ||
Standard type(THKC Series) | ||
Specifications
Maximum temperature : 1300Ž Heater: Top heat or standard heat type Crucible material: PBN Source capacity: 10cc`200cc
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High Temperature K-cell (THKC-1300HI THKC-1900HI) | ||
Specifications Maximum temperature : 1500Ž
Heater: Top heat type Crucible material: Alimina(4N) Source capacity: 10cc, 25cc
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Si K-cell(THKC-1000-HI) |
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Maximum temperature : 1600Ž Heater: Top heat type Crucible material: Special type Source capacity: 4cc
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Super Small K-cell(KC-1300-S)
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Specifications Maximum temperature : 1300Ž Crucible material: PBN Source capacity: 2cc
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Dual K-cell(DSGC-1400SH)
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Specifications Maximum temperature : 1300Ž (Solid Cell)
Crucible material: PBN
Source capacity: 6cc
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ECR Radical Cell (RC-1400AE) | ||
Specifications Plasma-enhance: ECR 2.45GHz Ion removal system Crucible material: BN Power supply: 10W`100W
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