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K-cell Series
Standard type(THKC Series)
Specifications
Maximum temperature :  1300Ž
Heater:  Top heat or standard heat type
Crucible material:  PBN
Source capacity: 10cc`200cc
High Temperature K-cell (THKC-1300HI THKC-1900HI)
Specifications
Maximum temperature :  1500Ž
Heater:  Top heat type
Crucible material:  Alimina(4N)
Source capacity: 10cc, 25cc
Si K-cell(THKC-1000-HI)
Specifications
Maximum temperature :  1600Ž
Heater:  Top heat type
Crucible material:  Special type
Source capacity: 4cc
Super Small K-cell(KC-1300-S)
Specifications
Maximum temperature :  1300Ž
Crucible material:  PBN
Source capacity: 2cc
Dual K-cell(DSGC-1400SH)
Specifications

Maximum temperature :  1300Ž (Solid Cell)
Crucible material:  PBN
Source capacity: 6cc
ECR Radical Cell (RC-1400AE)
Specifications
Plasma-enhance:
ECR 2.45GHz
Ion removal system
Crucible material:  BN
Power supply: 10W`100W
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